00:00:00.979 hello friends today I'm going to explain 00:00:06.65000:00:06.660 you about the smart code three 00:00:10.40000:00:10.410 multi target thermal evaporator system 00:00:13.37000:00:13.380 made by in high vacuum in this video I 00:00:18.50000:00:18.510 will explain you the block diagram or 00:00:23.33000:00:23.340 the schematic diagram of the system so 00:00:28.22000:00:28.230 let us begin with the block diagram here 00:00:36.20000:00:36.210 you can see the system diagram not a 00:00:40.45900:00:40.469 block diagram how the system is look 00:00:42.88900:00:42.899 like if you see the system you can see 00:00:47.45000:00:47.460 there is a bell jar in which there is a 00:00:51.83000:00:51.840 bell jar under which you can see the 00:00:55.36900:00:55.379 multi target turret is there there is 00:00:59.29900:00:59.309 also quad crystal monitor inside so quad 00:01:04.18900:01:04.199 crystal is there and other facilities if 00:01:10.21900:01:10.229 you opt it for since it is a customized 00:01:12.77000:01:12.780 system like a plasma cleaner so you will 00:01:17.42000:01:17.430 have a plasma electrode inside and press 00:01:23.27000:01:23.280 other of these things you can also have 00:01:26.96000:01:26.970 the electron beam ablation inside but 00:01:30.23000:01:30.240 this we have not opted for in our system 00:01:34.74900:01:34.759 so apart from this you can see on just 00:01:41.74900:01:41.759 below the bell jar there are two handles 00:01:46.78900:01:46.799 one is the bigger and one is the smaller 00:01:49.24900:01:49.259 smaller is the this is the needle wall 00:01:53.42000:01:53.430 to control the flow of the gases for the 00:01:58.76000:01:58.770 plasma purpose plasma generation or 00:02:01.28000:02:01.290 plasma cleaning and the bigger handle is 00:02:06.03900:02:06.049 to rotate the turret or the target 00:02:11.80000:02:11.810 under the vacuum from outside so without 00:02:17.11000:02:17.120 breaking the back him we can change the 00:02:19.99000:02:20.000 target inside on the right side you can 00:02:26.29000:02:26.300 see there are two panels one is vertical 00:02:30.33900:02:30.349 which is the display panel and one is 00:02:33.04000:02:33.050 the nearly horizontal or slanted at the 00:02:35.71000:02:35.720 40 or 30 degree which is a control panel 00:02:40.08900:02:40.099 so on the control you will find the 00:02:43.99000:02:44.000 various control because since it is a 00:02:46.36000:02:46.370 high vacuum system it consists of a 00:02:49.21000:02:49.220 rotary pump a primary pumping system and 00:02:52.21000:02:52.220 a turbo pump a secondary pumping system 00:02:54.55000:02:54.560 and the respective gauges like a running 00:03:00.94000:03:00.950 edges for the backing line of the turbo 00:03:04.12000:03:04.130 or the roughy of the chamber and other 00:03:07.63000:03:07.640 is a panning edge which will read a very 00:03:11.08000:03:11.090 low pressure or high vacuum less than 00:03:13.39000:03:13.400 one minus four and there are two other 00:03:17.59000:03:17.600 panels which will read the current for 00:03:19.93000:03:19.940 the secondary in case of the LT Moore 00:03:24.97000:03:24.980 and primary in case of the HT mode so HT 00:03:31.15000:03:31.160 is used for the plasma generation and LT 00:03:34.44900:03:34.459 is used for high current for the metal 00:03:39.25000:03:39.260 deposition other than this these there 00:03:43.87000:03:43.880 are few important things like venting 00:03:46.69000:03:46.700 the system so there will be a vent 00:03:49.72000:03:49.730 button there and LT HT control button 00:03:53.94900:03:53.959 will be there high back valve or gate 00:03:56.86000:03:56.870 valve button will be there so all these 00:04:00.69900:04:00.709 are valves are solenoid operated so 00:04:04.56900:04:04.579 these are all are having the electrical 00:04:06.52000:04:06.530 controls this system is very good 00:04:09.28000:04:09.290 because there is a pressure interlock is 00:04:12.19000:04:12.200 provided for any miss happening or for 00:04:15.75900:04:15.769 any human inner Hey error that can be 00:04:19.09000:04:19.100 prevented in this system there is you 00:04:23.44000:04:23.450 can see 00:04:24.90900:04:24.919 on the base their door so in this door 00:04:28.51000:04:28.520 all the pumps like rotary pump turbo 00:04:32.77000:04:32.780 pump - transformers 4 LT and HT and 00:04:39.86900:04:39.879 other things like different types of 00:04:46.55900:04:46.569 it's well this solenoid operated valves 00:04:51.68900:04:51.699 for backing roughing and venting the 00:04:57.55000:04:57.560 system all are inside this chamber only 00:05:00.30900:05:00.319 and the pan engage is directly connected 00:05:04.17900:05:04.189 to the chamber but having the bodies in 00:05:11.23000:05:11.240 the cabinet so the in inlet of the gage 00:05:17.40900:05:17.419 is opening directly into the chamber for 00:05:21.39000:05:21.400 high vacuum gauge like can engage but 00:05:25.68900:05:25.699 rest of the two gauges are just provided 00:05:28.49900:05:28.509 to see the backing of the turbo and the 00:05:32.64900:05:32.659 roughing of the chamber they are far 00:05:34.51000:05:34.520 from the actual chamber so let us begin 00:05:38.92000:05:38.930 how the schematic or the block diagram 00:05:42.36900:05:42.379 of the system is looking like so I will 00:05:46.51000:05:46.520 explain the one by one so this number 00:05:53.20000:05:53.210 one is the vacuum chamber or the bell 00:05:56.26000:05:56.270 jar where all the electrical connections 00:06:02.64900:06:02.659 are provided for the evaporation right 00:06:04.80900:06:04.819 now I am NOT going to explain you the 00:06:08.07900:06:08.089 step of the evaporation 00:06:09.76000:06:09.770 right now I am just going to tell you 00:06:11.95000:06:11.960 about the all the block diagram how the 00:06:15.60000:06:15.610 vacuum is created in the system to the 00:06:18.76000:06:18.770 minus 7 this system can go up to 1 a 00:06:24.01000:06:24.020 minus 7 within 1 and 1/2 are so this is 00:06:27.21900:06:27.229 the good thing and if you are using 00:06:30.51900:06:30.529 liquid nitrogen trap of the turbo pump 00:06:33.99900:06:34.009 even you can go below even Bonnie - sir 00:06:37.65000:06:37.660 on which the position of titanium gold 00:06:41.85000:06:41.860 or nickel gold and aluminum titanium 00:06:45.72000:06:45.730 aluminium and aluminum hood whatever you 00:06:48.78000:06:48.790 want to do they will stick properly to 00:06:51.99000:06:52.000 the samples so this is the good thing 00:06:54.60000:06:54.610 about this system that you can achieve 00:06:56.90000:06:56.910 pressure below 1 e minus seven as well 00:07:01.07000:07:01.080 so right now I'm going to explain you 00:07:04.55000:07:04.560 the one by one so these are the block 00:07:09.45000:07:09.460 diagram or the schematic diagram of the 00:07:13.02000:07:13.030 HHV smart code 3 you can see there is a 00:07:17.16000:07:17.170 vacuum chamber and the 2 is the chamber 00:07:20.58000:07:20.590 pressure gage or you can see this is the 00:07:22.23000:07:22.240 penning gage which is directly connected 00:07:24.06000:07:24.070 to the chamber so this is basically the 00:07:27.96000:07:27.970 high vacuum gauge or a penning gage make 00:07:31.38000:07:31.390 sure that you should never turn on the 00:07:35.28000:07:35.290 gage penning gage here just you turn on 00:07:40.98000:07:40.990 the system because you turn on when you 00:07:43.59000:07:43.600 turn on the system the pressure inside 00:07:46.29000:07:46.300 the chamber will be more than 1 II - 3 00:07:51.66000:07:51.670 or so so what you want to do here for 00:07:56.97000:07:56.980 these are the highway gages so make sure 00:08:00.27000:08:00.280 that pressure already 00:08:02.64000:08:02.650 go below 1 e minus 4 when you turn on 00:08:06.21000:08:06.220 the penning gage so make sure that you 00:08:10.80000:08:10.810 should never turn on the penning gage as 00:08:15.06000:08:15.070 you turn on the system it should be turn 00:08:18.72000:08:18.730 on only when high back wall is open with 00:08:25.02000:08:25.030 turbo in its maximum speed so now there 00:08:31.86000:08:31.870 is heard you can see there is a wall 00:08:33.99000:08:34.000 which is a high vacuum wall or you say 00:08:36.57000:08:36.580 the gate wall which is connecting the 00:08:40.92000:08:40.930 turbo to the chamber directly see here 00:08:45.47000:08:45.480 there is a high back wall which is 00:08:48.66000:08:48.670 connecting 00:08:50.42000:08:50.430 the turbo which is indicated by the five 00:08:54.59000:08:54.600 and four is just a trap so this is 00:08:58.01000:08:58.020 nothing but a thermal connection between 00:09:00.11000:09:00.120 the line there is no vacuum connection 00:09:03.56000:09:03.570 here but this is a just a line which is 00:09:06.41000:09:06.420 thermally contact with the line of 00:09:11.86000:09:11.870 pressure line so this is a part of the 00:09:16.25000:09:16.260 vacuum it is not a part of the vacuum 00:09:18.50000:09:18.510 circuit but it is thermally connected to 00:09:20.57000:09:20.580 the vacuum line so turbo is connected to 00:09:24.20000:09:24.210 the chamber means v is connected to the 00:09:27.77000:09:27.780 chamber through three so three is a 00:09:30.71000:09:30.720 solenoid wall and this is called the 00:09:33.89000:09:33.900 high-back one make sure you should never 00:09:37.37000:09:37.380 turn on the highway wall before turbo 00:09:42.80000:09:42.810 reaches to its maximum speed so make 00:09:45.20000:09:45.210 sure before opening the valve three or 00:09:48.71000:09:48.720 the highway qual turbos should reach to 00:09:51.35000:09:51.360 its maximum speed and when you should 00:09:55.46000:09:55.470 turn on the turbo for that also there is 00:09:58.64000:09:58.650 a provision in the backing line you can 00:10:01.07000:10:01.080 see the gauge is represented fit between 00:10:04.88000:10:04.890 five and six is basically a number eight 00:10:07.85000:10:07.860 which is headed here so it is a backing 00:10:11.90000:10:11.910 pressure gauge so this should be the 00:10:14.03000:10:14.040 pressure in the backing line of the 00:10:16.19000:10:16.200 turbo should be less than - 5 e - 2 00:10:21.56000:10:21.570 milli bar so as soon once it reaches to 00:10:24.98000:10:24.990 the 5 e minus 2 milli bar how you can go 00:10:28.64000:10:28.650 below 5 e minus 2 milli bar for that 00:10:30.62000:10:30.630 there is a rotary pump is there this is 00:10:33.86000:10:33.870 represented by 16 so as soon as you turn 00:10:37.22000:10:37.230 on the system you should turn on the 00:10:39.11000:10:39.120 rotary pump and you should operate the 00:10:42.92000:10:42.930 valve number 7 or we should choose the 00:10:46.64000:10:46.650 valve number 7 to open so that rotary 00:10:50.45000:10:50.460 will be connected to the backing line of 00:10:52.46000:10:52.470 the turbo so as soon as you connect the 00:10:55.82000:10:55.830 rotary to the backing line of the turbo 00:10:57.68000:10:57.690 the gauge associated with the backing of 00:11:01.04000:11:01.050 the turbo which is 8 backing pressure 00:11:03.35000:11:03.360 gage 00:11:04.13900:11:04.149 we'll go at lower pressure and rotary 00:11:08.67000:11:08.680 will pump easily up to less than Phi B 00:11:11.91000:11:11.920 -2 millibar so as soon as you reach 00:11:14.91000:11:14.920 below this pressure 5-2 millibar then 00:11:17.91000:11:17.920 you can turn on the turbo pump so now 00:11:22.86000:11:22.870 you have turn on the rotary you have 00:11:25.61900:11:25.629 connected rotate to the backing line of 00:11:28.01900:11:28.029 the turbo and when this pressure in the 00:11:31.79900:11:31.809 backing line which is below 5 V minus 2 00:11:35.22000:11:35.230 you turn on the turbo pump now you have 00:11:40.82900:11:40.839 to wait for 15 to 20 minutes to reach 00:11:43.31900:11:43.329 the turbo to its maximum speed once it 00:11:46.61900:11:46.629 reaches to the maximum speed the switch 00:11:51.36000:11:51.370 associated to the turbo pump will glow 00:11:53.99900:11:54.009 green or you can also find out by 00:11:59.30900:11:59.319 opening the chamber the chamber front 00:12:03.29900:12:03.309 door front door actually front door not 00:12:07.35000:12:07.360 the chamber front door of the cabinet of 00:12:10.71000:12:10.720 the system so if you find out if you 00:12:14.93900:12:14.949 open the front door of the cabinet of 00:12:17.34000:12:17.350 the system you will see there is a turbo 00:12:21.74900:12:21.759 panel is their separate turbo panel if 00:12:25.04900:12:25.059 they are on which you can see the 00:12:27.23900:12:27.249 indications of the speed so as soon as 00:12:30.36000:12:30.370 turbo reaches to its maximum speeds 00:12:33.07900:12:33.089 speed it will show all green so four of 00:12:40.19900:12:40.209 the symbols will show green and that 00:12:43.35000:12:43.360 will be the indication that turbo reach 00:12:48.68900:12:48.699 two it's the maximum speed or the simple 00:12:51.38900:12:51.399 way just to see in from the control 00:12:55.19900:12:55.209 panel the switch is going green so once 00:13:00.90000:13:00.910 the switch is going green then you can 00:13:02.91000:13:02.920 open number three here so as soon as you 00:13:08.06900:13:08.079 open three wait for 10 minutes and note 00:13:11.04000:13:11.050 down the pressure in the two penning 00:13:14.73000:13:14.740 gage so this is very important step it 00:13:17.61000:13:17.620 will 00:13:17.85000:13:17.860 tell you the performance of the system 00:13:20.67000:13:20.680 or the leakage or something other miss 00:13:23.75900:13:23.769 happening may happen so if it is good 00:13:26.81900:13:26.829 means it will - is reaching below 1 e -6 00:13:30.87000:13:30.880 or so within 10 minutes then the health 00:13:33.93000:13:33.940 of the chamber of the system or the 00:13:36.50900:13:36.519 system is very good so you can leave the 00:13:39.30000:13:39.310 system to pump around 1 hour 1 hour - 00:13:41.97000:13:41.980 when and how far it will reach around 00:13:45.09000:13:45.100 body - 7 million and at the time you can 00:13:47.97000:13:47.980 add the liquid nitrogen to the lake Ln - 00:13:51.00000:13:51.010 trap and then it can start evaporation 00:13:53.93000:13:53.940 by taking some step useful step now I'm 00:13:58.59000:13:58.600 moving to the number 4 for is the liquid 00:14:01.92000:14:01.930 nitrogen trap I told you it is required 00:14:04.62000:14:04.630 to add some liquid nitrogen after the 00:14:09.53000:14:09.540 pumping the chamber 1 to 1 and 1/2 are 00:14:13.10000:14:13.110 you need to add a liquid nitrogen to the 00:14:16.76900:14:16.779 liquid nitrogen trap do the 4 means 00:14:21.42000:14:21.430 liquid nitrogen trap is not a part of 00:14:24.30000:14:24.310 the vacuum circuit but it is providing a 00:14:28.76900:14:28.779 cooling to the vacuum line which is 00:14:32.81000:14:32.820 above the turbo and below the chamber it 00:14:38.85000:14:38.860 prevents basically fumes to go into the 00:14:42.66000:14:42.670 turbo blades metal fumes to the turbo 00:14:45.68900:14:45.699 blades because when you evaporate metals 00:14:49.17000:14:49.180 in the chamber there is a finite 00:14:52.01900:14:52.029 probability of going the fumes or the 00:14:58.73000:14:58.740 metal atoms or clusters towards the 00:15:06.65000:15:06.660 turbo pump so to prevent those clusters 00:15:12.06000:15:12.070 or fumes liquid nitrogen trap is 00:15:16.25900:15:16.269 provided so all the fumes will be 00:15:18.63000:15:18.640 collected or will be trapped into the 4 00:15:20.91000:15:20.920 so this is called the liquid nitrogen 00:15:22.82900:15:22.839 trap later on we will come to file we 00:15:28.50000:15:28.510 have already discussed about this this 00:15:31.05000:15:31.060 is a 00:15:31.56000:15:31.570 Oh pump and how it should be operated it 00:15:34.86000:15:34.870 should be operated only when the gauge 00:15:38.64000:15:38.650 associated to the packing line should 00:15:40.62000:15:40.630 reach below 5 e- to millibar then we 00:15:43.74000:15:43.750 should turn on the turbo and later and 00:15:46.62000:15:46.630 you can see there is a 6 this is the 00:15:48.33000:15:48.340 connection this is nothing more than 00:15:49.92000:15:49.930 that 00:15:50.19000:15:50.200 it's a flexible connection and like 00:15:53.49000:15:53.500 below pipe or something then there is 7 00:15:57.63000:15:57.640 7 & 9 00:15:59.28000:15:59.290 they are just controlled by a single 00:16:03.03000:16:03.040 switch so because you can choose rotary 00:16:07.62000:16:07.630 to be connected in either direction 00:16:09.48000:16:09.490 either 9 or to the 7 7 is associated to 00:16:13.14000:16:13.150 the backing line of the turbo while the 00:16:15.54000:16:15.550 9 is associated to the roughing of the 00:16:17.82000:16:17.830 chamber why when you connect the turbo 00:16:26.28000:16:26.290 to the chamber 1 means if you are 00:16:30.90000:16:30.910 connecting the high-speed turbo means 00:16:34.83000:16:34.840 you want to pump the chamber using the 00:16:37.83000:16:37.840 turbo so how you can do that so the 00:16:41.84000:16:41.850 basic thing is that you should not 00:16:45.66000:16:45.670 operate from the atmospheric pressure so 00:16:51.51000:16:51.520 you should not connect the chamber at 00:16:53.82000:16:53.830 atmospheric pressure to the turbo pump 00:16:58.40000:16:58.410 so always be careful before connecting 00:17:02.21000:17:02.220 or before opening to the 3 means high 00:17:07.61000:17:07.620 back wall or the gate world to the 00:17:10.71000:17:10.720 chamber 00:17:11.34000:17:11.350 make sure the chamber pressure itself 00:17:14.00000:17:14.010 below 5 e - 2 millibar v e - 2 millibar 00:17:21.19900:17:21.209 so for doing that what we can do 00:17:25.38000:17:25.390 actually we can connect for 1 or 2 00:17:29.94000:17:29.950 minutes the rotary pump 16 and 16 is a 00:17:35.55000:17:35.560 rotary pump - by opening the 9 so 9 is 00:17:39.42000:17:39.430 the roughing wall so if we open the 00:17:43.53000:17:43.540 roughing wall which is the 00:17:47.12000:17:47.130 it will connect directly to the chamber 00:17:51.84000:17:51.850 so rotary will be connected directly to 00:17:53.70000:17:53.710 the chambers rotary will pump out the 00:17:55.91000:17:55.920 chamber till 5-2 millibar or less it may 00:17:59.79000:17:59.800 be less than less than that so at this 00:18:03.78000:18:03.790 position what you can do you can again 00:18:06.48000:18:06.490 connect rooty to the backing line seven 00:18:11.19000:18:11.200 so close to nine and open the seven and 00:18:14.69000:18:14.700 then you can connect three to the 00:18:19.11000:18:19.120 chamber so the highway while you can 00:18:22.17000:18:22.180 connect to the chamber so the basic 00:18:25.71000:18:25.720 thing is that what you are doing by 00:18:27.69000:18:27.700 doing so means you are evacuating the 00:18:30.78000:18:30.790 chamber and also you are evacuating the 00:18:32.97000:18:32.980 backing line of the turbo so turbo 00:18:36.09000:18:36.100 blades will not see a lot of pressure 00:18:38.76000:18:38.770 difference that's what you are doing 00:18:42.81000:18:42.820 doing here by making the pressure low 00:18:46.23000:18:46.240 enough in the chamber and low enough in 00:18:48.66000:18:48.670 the backing line so let's move further 00:18:53.18000:18:53.190 so eight is the gauge associated to the 00:18:58.10000:18:58.110 packing line of the turbo which is a 00:19:00.45000:19:00.460 peon engage this you can keep turn on 00:19:03.57000:19:03.580 always unlike the gage number two which 00:19:06.90000:19:06.910 is a penning gage that can only be turn 00:19:09.48000:19:09.490 on when the turbo is connected to the 00:19:12.45000:19:12.460 chamber because the two is directly 00:19:15.42000:19:15.430 linked to the chamber also this is 00:19:20.13000:19:20.140 ionization gage it may damage if you try 00:19:23.58000:19:23.590 to operate it be above funny - for 00:19:28.29000:19:28.300 millibar and nine you can see this is 00:19:32.67000:19:32.680 the nine is the roughing wall we have 00:19:34.26000:19:34.270 already discussed what is the use of 00:19:35.88000:19:35.890 seven and nine so these all which are 00:19:40.76000:19:40.770 make with the indication like electrical 00:19:44.01000:19:44.020 control solenoid so these two are the 00:19:46.38000:19:46.390 solenoid valve operated by switch so say 00:19:50.22000:19:50.230 nine is connecting rotary pump to 00:19:54.45000:19:54.460 directly to the chamber 00:19:58.03000:19:58.040 so this is very important to know about 00:19:59.71000:19:59.720 the 7 & 9 we have already discussed the 00:20:02.53000:20:02.540 procedure now we can come to the 10 if 00:20:06.43000:20:06.440 you have done all the method all the 00:20:10.06000:20:10.070 deposition and all then if you see the 00:20:13.18000:20:13.190 10 is nothing but a directly connection 00:20:16.51000:20:16.520 to the environment to the chamber so 00:20:20.86000:20:20.870 this is the kind of band fault if you 00:20:23.38000:20:23.390 try it if you want to vent the system 00:20:25.48000:20:25.490 then you should turn on the 10 with 10 00:20:32.17000:20:32.180 is the length 1 so make sure that gate 00:20:36.01000:20:36.020 world or the high-back valve is closed 00:20:39.01000:20:39.020 before opening the vent wall so this you 00:20:45.46000:20:45.470 should be already taken care of and also 00:20:48.34000:20:48.350 make sure before winding the system you 00:20:51.25000:20:51.260 have turn on turn of the 2 means 00:20:54.43000:20:54.440 spanning gauge should be turned off and 00:20:59.04000:20:59.050 the gate wall or the higher quality air 00:21:03.19000:21:03.200 is to think you have to remember before 00:21:06.84000:21:06.850 opening the vent wall otherwise turbo or 00:21:13.02000:21:13.030 the panning gauge or both may damage the 00:21:16.99000:21:17.000 system so make sure you are very careful 00:21:20.98000:21:20.990 while operating the paint wall now 00:21:24.61000:21:24.620 sintered filter 11 is a sintered filter 00:21:27.91000:21:27.920 which is nothing but it is a filter kind 00:21:31.63000:21:31.640 of made from steel is provided so that 00:21:37.00000:21:37.010 the from the environment or from the 00:21:39.91000:21:39.920 outer gases whatever you are standing or 00:21:42.22000:21:42.230 dry air or something no dust or moisture 00:21:46.03000:21:46.040 can go inside the chamber so not 12 if 00:21:53.35000:21:53.360 you go to 12 12 is a kind of needle 1 00:22:00.99000:22:01.000 here you can see this control of little 00:22:04.93000:22:04.940 valve that I told you on just below de 00:22:09.51000:22:09.520 just 00:22:10.61000:22:10.620 below the bell jar or the chamber there 00:22:14.84000:22:14.850 are two controls are there two hand 00:22:18.56000:22:18.570 controls manual controls are there 00:22:20.91900:22:20.929 bigger one is for rotating the turret or 00:22:24.32000:22:24.330 the target and second one is the needle 00:22:26.39000:22:26.400 ball this needle wall is needed when you 00:22:30.56000:22:30.570 are trying to make the plasma inside the 00:22:33.59000:22:33.600 chamber for cleaning the samples and all 00:22:36.66900:22:36.679 so this actually control the gas flow 00:22:43.24000:22:43.250 inside the chamber when you want to make 00:22:47.93000:22:47.940 a plasma inside so you can connect the 00:22:52.49000:22:52.500 suitable gas for which you want to make 00:22:55.58000:22:55.590 a plasma and then you can control the 00:22:58.25000:22:58.260 pressure from this knob and keep the 00:23:01.14900:23:01.159 turbo in crack open keep the gate valve 00:23:06.52900:23:06.539 in crak mode operation crack opening 00:23:10.96000:23:10.970 crack open the gate wall and control the 00:23:15.32000:23:15.330 flow from 12 and you can make a DC 00:23:19.39900:23:19.409 plasma inside by HD operation in our 00:23:24.50000:23:24.510 system we are not using this facility 00:23:27.66900:23:27.679 but we have but we are not using it for 00:23:31.99000:23:32.000 some regions so 13 is a vacuum interlock 00:23:39.22000:23:39.230 this interlock is very essential suppose 00:23:43.72000:23:43.730 if you have kept on the gate wall or the 00:23:48.71000:23:48.720 highway pod or penning gage or you in 00:23:53.12000:23:53.130 that case you want to try to try to open 00:24:00.23000:24:00.240 the vent wall system should not respond 00:24:05.09000:24:05.100 for your wrong command or the manual 00:24:07.13000:24:07.140 error so for this region there is a 00:24:10.78900:24:10.799 vacuum interlock is provided this 00:24:15.52900:24:15.539 interlock is the extra safety purpose 00:24:20.14900:24:20.159 for the beginners 00:24:23.26000:24:23.270 if they made a mistake but always it is 00:24:29.39000:24:29.400 not a good practice to use this kind of 00:24:35.83000:24:35.840 facilities because you should be very 00:24:38.15000:24:38.160 careful while doing all the processing 00:24:40.75000:24:40.760 so make sure that your much you are not 00:24:45.83000:24:45.840 relying on the interlock much so make it 00:24:49.13000:24:49.140 your procedure so accurate that so that 00:24:52.85000:24:52.860 you are not relying on the interlocks 00:24:55.39000:24:55.400 though it is provided but we should be 00:24:58.67000:24:58.680 extra careful while doing the things 00:25:08.45000:25:08.460 you 00:26:25.54000:26:25.550 now we can come to the 10 if you have 00:26:30.02000:26:30.030 done all the method all the deposition 00:26:33.41000:26:33.420 and all then if you see the 10 is 00:26:36.26000:26:36.270 nothing but a directly connection to the 00:26:39.50000:26:39.510 environment to the chamber so the main 00:26:43.85000:26:43.860 thing is that 16 so 16 is a number lost 00:26:49.49000:26:49.500 but it is the most important part of the 00:26:52.37000:26:52.380 system because this is the turbo sorry 00:26:55.01000:26:55.020 rotary pump or primary rotary pump which 00:26:59.18000:26:59.190 is used initially and when you turn on 00:27:06.59000:27:06.600 the system you should turn on the two 00:27:09.68000:27:09.690 gauges Pirani gauge --is and this roadie 00:27:14.27000:27:14.280 pump at the very first moment so when 00:27:19.94000:27:19.950 you turn on the rotary you should turn 00:27:24.77000:27:24.780 on the two gauges then you operate the 00:27:27.83000:27:27.840 wild number seven or nine to make the 00:27:31.94000:27:31.950 pressure Arrangements where you want to 00:27:34.07000:27:34.080 connect this rotary for pumping 00:27:36.16000:27:36.170 initially we connect rotary to the nine 00:27:41.41000:27:41.420 means roughing to the chamber so when we 00:27:45.59000:27:45.600 get sufficient less pressure inside the 00:27:49.13000:27:49.14000:27:50.11000:27:50.120 then we connect rotary to the backing 00:27:54.23000:27:54.240 line of the turbo and when it reaches 00:27:57.11000:27:57.120 less than five - to millibar we turn on 00:27:59.99000:28:00.000 the turbo pump and wait for 15 - 20 00:28:04.43000:28:04.440 minutes - reaches maximum speed then 00:28:08.11000:28:08.120 again we connect this rotary to the 00:28:11.86000:28:11.870 roughing to make the pressure in 00:28:14.63000:28:14.640 roughing less than five in - to millibar 00:28:16.79000:28:16.800 then again connect to the backing line 00:28:20.30000:28:20.310 of the turbo then we open the three 00:28:24.32000:28:24.330 means gate valve or high wall so now the 00:28:29.60000:28:29.610 turbo is pumping to the chamber and then 00:28:34.70000:28:34.710 after two minutes we can turn on the pen 00:28:37.82000:28:37.830 engage 00:28:38.74900:28:38.759 read the pressure and after 10 minutes 00:28:41.08900:28:41.099 we note down the pressure to check the 00:28:43.54900:28:43.559 health of the pumping system or vacuum 00:28:46.24900:28:46.259 system so if it is led around money - 6 00:28:50.29900:28:50.309 millibar in 10 minutes then the health 00:28:53.23900:28:53.249 of the system is very good so we can 00:28:56.11900:28:56.129 leave the system to pump around 1 or 2 1 00:28:59.47900:28:59.489 - how 1 and half hours and it should 00:29:03.64900:29:03.659 reach less than 5 min - 7 millibar and 00:29:06.96900:29:06.979 once it is reach 5 a - 7 millibar then 00:29:11.86900:29:11.879 we add liquid nitrogen to the Ln - trap 00:29:15.46900:29:15.479 which is number 4 here we add a decayed 00:29:19.24900:29:19.259 nitrogen here and wait for 10 minutes 00:29:22.51900:29:22.529 and then we can turn on the chiller for 00:29:29.71900:29:29.729 the quad crystal monitor and we can 00:29:31.72900:29:31.739 start a position 17 here exist outlet 00:29:36.76900:29:36.779 which is nothing but the extract gases 00:29:43.06900:29:43.079 from the chamber so that we need to 00:29:46.51900:29:46.529 throw out from the system so this is the 00:29:49.48900:29:49.499 exhaust so this is the each panning 00:29:53.08900:29:53.099 gauge here just you turn on the system 00:29:57.85900:29:57.869 because you turn on when you turn on the 00:30:00.73900:30:00.749 system the pressure inside the chamber 00:30:03.57900:30:03.589 will be more than 1 00:30:07.06900:30:07.079 II - 3 or so so what you want to do here 00:30:12.97900:30:12.989 for these are the highway gauges so make 00:30:16.54900:30:16.559 sure that pressure already go below 1e 00:30:20.32900:30:20.339 minus 4 when you turn on the penning 00:30:24.16900:30:24.179 gage so make sure that you should never 00:30:27.79900:30:27.809 turn on the penning gage as you turn on 00:30:32.98900:30:32.999 the system it should be turn on only 00:30:35.86900:30:35.879 when high that wall is open with turbo 00:30:42.37900:30:42.389 in its maximum speed so 00:30:53.62000:30:53.630
Office location
Engineering company LOTUS®
Russia, Ekaterinburg, Lunacharskogo street, 240/12